Greater Performance than Previously Available
SiFusion Polysilicon Furnaceware offers greater performance than previously available with quartz and silicon carbide consumables.
All SiFusion products are constructed from 99.9999% high-purity polysilicon materials, offering the choice of purity, low maintenance, cost of ownership, and environmental impact. The product range includes components for all 200 mm and 300 mm horizontal and vertical furnace applications.
SiFusion furnaceware is designed and manufactured for easy installation in the hot zone of most major OEM furnaces including Tokyo Electron (TEL), KE, ASM, and others.
SiFusion Product Suite
Bringing SiFusion components together for an all-silicon hot zone solution fully realizes the advantage of SiFusion technology and poly silicon’s inherently superior characteristics.