A High-Purity, High-Performance Replacement Technology for Quartz and Silicon Carbide Fixtures
Designed for diffusion furnace processes, SiFusion polysilicon boats represent a high-purity, high-performance replacement technology for existing quartz and silicon carbide fixtures. They are critical to the elimination of particles and crystallographic slip. Removing these barriers to increased yields makes SiFusion boats an essential tool for new IC architectures.
SiFusion product suite includes boat models for all major furnace models of vertical furnaces.