A Superior Replacement for Quartz and Silicon Carbide Fixtures

SiFusion polysilicon injectors serve as in-situ fixtures that deliver process gas into the diffusion furnace processes.

With high mechanical strength and no plastic deformation at temperatures up to 1350°C, SiFusion injectors are a superior replacement for current quartz and silicon carbide fixtures.

SiFusion injectors:

  • Eliminate injector particle bursts
  • Will not bend or break during operations
  • Array configurable to customer specs
  • Have long lifespan


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