A Superior Replacement for Quartz and Silicon Carbide Fixtures
SiFusion polysilicon injectors serve as in-situ fixtures that deliver process gas into the diffusion furnace processes.
With high mechanical strength and no plastic deformation at temperatures up to
- Eliminate injector particle bursts
- Will not bend or break during operations
- Array configurable to customer specs
- Transparent to IR—reducing thermal shadowing
- Have long lifespan