High-Purity, High Performance Replacements
SiFusion polysilicon pedestals are in-situ fixtures that support boats during diffusion and thermal processing. As in all SiFusion products, these pedestals are high-purity, high performance replacements for quartz and silicon carbide fixtures.
SiFusion pedestals represent:
- Proven performance in 150 mm, 200 mm, 300 mm settings
- Slots, rails and pitch—specified by customer
- No fixture-generated particles
- No routine cleaning