High-Purity, High Performance Replacements

SiFusion polysilicon pedestals are in-situ fixtures that support boats during diffusion and thermal processing. As in all SiFusion products, these pedestals are high-purity, high performance replacements for quartz and silicon carbide fixtures.

SiFusion pedestals represent:

  • Proven performance in 150 mm, 200 mm, 300 mm settings
  • Slots, rails and pitch—specified by customer
  • No fixture-generated particles
  • No routine cleaning


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