Pure Polysilicon Offers A Significant Competitive Advantage
Put head-to-head with silicon carbide and quartz, poly silicon’s physical characteristics create a significant competitive advantage in the furnace environment.
For example, the identical Coefficient of Thermal Expansion (CTE) between a silicon wafer and a SiFusion poly silicon fixture eliminates backside wafer scratching and damage. The SiFusion patented poly silicon high-temperature furnaceware also reduces fixture-related slip, eliminates wafer pinching, and allows for increased ramp rates and decreased stabilization times.
General Strength Comparison
| Material | Specific stiffness Gpa/g/cmų |
Poissons Ratio v |
Strength MPa |
Knoop hardness Kg/mmŲ |
Thermal shock Figure of Merit |
|---|---|---|---|---|---|
| SiC CVD | 145 | 0.21 | 600 | 2540 | 110 |
| SiO | 30.3 | 0.17 | 110 | 460 | 4.8 |
| Silicon | 56.2 | 0.28 | 120 | 1150 | 41 |