Pure Polysilicon Offers A Significant Competitive Advantage

Put head-to-head with silicon carbide and quartz, poly silicon’s physical characteristics create a significant competitive advantage in the furnace environment.

For example, the identical Coefficient of Thermal Expansion (CTE) between a silicon wafer and a SiFusion poly silicon fixture eliminates backside wafer scratching and damage. The SiFusion patented poly silicon high-temperature furnaceware also reduces fixture-related slip, eliminates wafer pinching, and allows for increased ramp rates and decreased stabilization times.

General Strength Comparison

MaterialSpecific stiffness
Gpa/g/cmų
Poissons
Ratio v
Strength
MPa
Knoop hardness
Kg/mmŲ
Thermal shock
Figure of Merit
SiC CVD1450.216002540110
SiO30.30.171104604.8
Silicon56.20.28120115041

The Thermal Conductivity of Silicon is Almost 100 Times Greater Than That of Quartz.”

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