Pure Polysilicon Offers A Significant Competitive Advantage
Put head-to-head with silicon carbide and quartz, poly silicon’s physical characteristics create a significant competitive advantage in the furnace environment.
For example, the identical Coefficient of Thermal Expansion (CTE) between a silicon wafer and a SiFusion poly silicon fixture eliminates backside wafer scratching and damage. The SiFusion patented poly silicon high-temperature furnaceware also reduces fixture-related slip, eliminates wafer pinching, and allows for increased ramp rates and decreased stabilization times.
General Strength Comparison
|Material||Specific stiffness |
|Knoop hardness |
|Thermal shock |
Figure of Merit